Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm

We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5-6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo / B 4 C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved...

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Bibliographic Details
Published in:Applied physics letters 2010-09, Vol.97 (11), p.111503-111503-3
Main Authors: Otsuka, Takamitsu, Kilbane, Deirdre, White, John, Higashiguchi, Takeshi, Yugami, Noboru, Yatagai, Toyohiko, Jiang, Weihua, Endo, Akira, Dunne, Padraig, O'Sullivan, Gerry
Format: Article
Language:English
Subjects:
BORON CARBIDES
BORON COMPOUNDS
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTROMAGNETIC RADIATION
ELECTRON TEMPERATURE
ELEMENTS
EMISSION
ENERGY RANGE
EV RANGE
EXPANSION
EXTREME ULTRAVIOLET RADIATION
GADOLINIUM
IONS
LASER-PRODUCED PLASMA
LAYERS
METALS
MIRRORS
MOLYBDENUM
MULTICHARGED IONS
PHOTON EMISSION
PLASMA
PLASMA EXPANSION
PLASMA PRODUCTION
RADIATIONS
RARE EARTHS
REFRACTORY METALS
TERBIUM
TRANSITION ELEMENTS
ULTRAVIOLET RADIATION
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Summary:We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5-6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo / B 4 C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved transition array. The spectra of these resonant lines around 6.7 nm (in-band: 6.7 nm ±1%) suggest that the in-band emission increases with increased plasma volume by suppressing the plasma hydrodynamic expansion loss at an electron temperature of about 50 eV, resulting in maximized emission.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3490704