Mirror profile optimization for nano-focusing KB mirror

A KB focusing mirror width profile has been optimized to achieve nano-focusing for the nano-imaging end-station ID22NI at the ESRF. The complete mirror and flexure bender assembly has been modeled in 3D with finite element analysis using ANSYS. Bender stiffness, anticlastic effects and geometrical n...

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Bibliographic Details
Main Authors: Zhang Lin, Baker, Robert, Barrett, Ray, Cloetens, Peter, Dabin, Yves
Format: Conference Proceeding
Language:English
Subjects:
ACTUATORS
ADHESIVES
ANISOTROPY
BONDING
CALCULATION METHODS
CRYSTALS
ELECTROMAGNETIC RADIATION
EUROPEAN SYNCHROTRON RADIATION FACILITY
FABRICATION
FINITE ELEMENT METHOD
FLEXIBILITY
FOCUSING
IONIZING RADIATIONS
JOINING
MATHEMATICAL SOLUTIONS
MECHANICAL PROPERTIES
MIRRORS
NANOSCIENCE AND NANOTECHNOLOGY
NONLINEAR PROBLEMS
NUMERICAL SOLUTION
OPTICS
OPTIMIZATION
ORIENTATION
RADIATION SOURCES
RADIATIONS
RESOLUTION
SYNCHROTRON RADIATION SOURCES
TENSILE PROPERTIES
X RADIATION
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Summary:A KB focusing mirror width profile has been optimized to achieve nano-focusing for the nano-imaging end-station ID22NI at the ESRF. The complete mirror and flexure bender assembly has been modeled in 3D with finite element analysis using ANSYS. Bender stiffness, anticlastic effects and geometrical non-linear effects have been considered. Various points have been studied: anisotropy and crystal orientation, stress in the mirror and bender, actuator resolution and the mirror-bender adhesive bonding... Extremely high performance of the mirror is expected with residual slope error smaller than 0.6 {mu}rad, peak-to-valley, compared to the bent slope of 3000 {mu}rad.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3463335