Analytical fit of the I-V characteristic for cylindrical and spherical probes in electronegative plasmas

This paper developes a theoretical model for the sheath that surrounds cylindrical and spherical Langmuir probes immersed in an electronegative plasma. The model allows the electric potential profile surrounding the negatively polarized probe, the densities of the different charged particles within...

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Bibliographic Details
Published in:Journal of applied physics 2004-11, Vol.96 (9), p.4777-4783
Main Authors: Crespo, R. Morales, Palop, J. I. Fernández, Hernández, M. A., Borrego del Pino, S., Ballesteros, J.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ANIONS
CYLINDRICAL CONFIGURATION
ELECTRIC CONDUCTIVITY
ELECTRIC POTENTIAL
ELECTRON TEMPERATURE
ELECTRONEGATIVITY
ION TEMPERATURE
LANGMUIR PROBE
PLASMA
PLASMA DENSITY
PLASMA SHEATH
PLASMA SIMULATION
POTENTIALS
SPHERICAL CONFIGURATION
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Summary:This paper developes a theoretical model for the sheath that surrounds cylindrical and spherical Langmuir probes immersed in an electronegative plasma. The model allows the electric potential profile surrounding the negatively polarized probe, the densities of the different charged particles within the sheath, and the I-V characteristic curves to be determined for several negative ion density and temperature values. These curves are fitted analytically, permitting expressions to be obtained for the potential profile, the floating potential, and the sheath edge.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1796517