Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties

► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation techni...

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Bibliographic Details
Published in:Optical materials 2012-11, Vol.35 (1), p.25-28
Main Authors: Gaathon, O., Adam, J.D., Krishnaswamy, S.V., Kysar, J.W., Bakhru, S., Bakhru, H., Welch, D.O., Osgood, R.M.
Format: Article
Language:English
Subjects:
Crystal Ion Slicing
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Ion Implantation
Optical materials
Optics
Physics
Thin-film
Yttrium Aluminum Garnet
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Summary:► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique. We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200°C to relax the residual strain and film curvature that arose from the ion implantation process.
ISSN:0925-3467
1873-1252
DOI:10.1016/j.optmat.2012.06.009