Direct writing of Cu-based micro-temperature detectors using femtosecond laser reduction of CuO nanoparticles

Cu-based micro-temperature detectors were fabricated using femtosecond laser reduction of CuO nanoparticles. Cu-based microstructures were directly created by laser scanning on a CuO nanoparticle solution film. Cu-rich and Cu2O-rich microstructures were selectively formed to electrically connect two...

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Bibliographic Details
Published in:Applied physics express 2016-03, Vol.9 (3), p.36701
Main Authors: Mizoshiri, Mizue, Arakane, Shun, Sakurai, Junpei, Hata, Seiichi
Format: Article
Language:English
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Summary:Cu-based micro-temperature detectors were fabricated using femtosecond laser reduction of CuO nanoparticles. Cu-based microstructures were directly created by laser scanning on a CuO nanoparticle solution film. Cu-rich and Cu2O-rich microstructures were selectively formed to electrically connect two Cu thin-film electrodes for use in temperature detectors. Cu-rich and Cu2O-rich micro-temperature detectors were fabricated at scanning speeds of 500 and 1000 µm/s, respectively, at a pulse energy of 1.2 nJ. The temperature coefficient of resistance values of the Cu-rich and Cu2O-rich microstructures were positive and negative, respectively; these temperature behaviors are typical of metal and semiconductor materials, respectively.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.9.036701