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Corrosion Inhibition and the Synergistic Effect of Three Different Inhibitors on Copper Surface
Copper(Cu) has been an interconnect material widely used in giant-large scale integrated circuits (GLSI). Corrosion inhibitor is a key factor to ensure global planarization of Cu in the CMP slurry. In this paper, three selected inhibitors BTA(Benzotriazole), TAZ(1,2,4-triazole), and MBO( 2-Benzoxazo...
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Published in: | ECS journal of solid state science and technology 2022-05, Vol.11 (5), p.54009 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Copper(Cu) has been an interconnect material widely used in giant-large scale integrated circuits (GLSI). Corrosion inhibitor is a key factor to ensure global planarization of Cu in the CMP slurry. In this paper, three selected inhibitors BTA(Benzotriazole), TAZ(1,2,4-triazole), and MBO( 2-Benzoxazolethione) were investigated inhibition behaviors and synergy on the Cu surface. The results show that they are all effective Cu inhibitors in alkaline solutions. MBO loses its ability in H
2
O
2
, but BTA and TAZ do not. The calculated synergistic parameters of BTA/TAZ is 0.1763, XPS and UV–Via experiments show that the antagonism between them is caused by two competitive reactions due to the similar adsorption mechanism: one is the competition for the adsorption site on the surface, and the other is the competition of copper ions that affects the formation of Cu(I)-BTA. The calculated synergistic parameter of BTA/MBO is 1.7763, the synergy between them is obvious. |
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ISSN: | 2162-8769 2162-8777 |
DOI: | 10.1149/2162-8777/ac6d75 |