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The influence of process effects of argon plasma on the elements distribution in the surface layer of VT16 titanium alloy during vacuum ion-plasma treatment

The influence of process effects of electron and ion streams of argon plasma on the elements distribution in the surface layer of VT16 alloy has been investigated. It has been shown that the interaction of plasma stream elements with the surface under treatment serves to generate processes of back d...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-11, Vol.1121 (1), p.12023
Main Authors: Petrov, L M, Grigorovich, K V, Sprygin, G S, Ivanchuk, S B, Smirnova, A N, Semionov, V D
Format: Article
Language:English
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Summary:The influence of process effects of electron and ion streams of argon plasma on the elements distribution in the surface layer of VT16 alloy has been investigated. It has been shown that the interaction of plasma stream elements with the surface under treatment serves to generate processes of back diffusion of the substrate elements to the surface thus changing the distribution of elements in the surface layer.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1121/1/012023