Micro Coriolis Mass Flow Sensor Based on Electroplated Nickel Tubes

This paper presents a nickel plated Coriolis mass flow sensor that has been tested using water flow. The sensor consists of a free suspended tube which was fabricated by electroplating nickel on a polymer mold. The tube has a total length of 37 mm, a diameter of 280 µm and a wall thickness of 60 µm....

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Bibliographic Details
Main Authors: Yariesbouei, M., Sanders, R.G.P., Wiegerink, R.J., Lotters, J. C.
Format: Conference Proceeding
Language:English
Subjects:
Coriolis mass flow sensor
cylindrical tube
Electron tubes
Lorentz covariance
Nickel
Nickel electroplated tube
Resistance
Stability analysis
Vibrations
Vibrometers
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Summary:This paper presents a nickel plated Coriolis mass flow sensor that has been tested using water flow. The sensor consists of a free suspended tube which was fabricated by electroplating nickel on a polymer mold. The tube has a total length of 37 mm, a diameter of 280 µm and a wall thickness of 60 µm. The tube is driven into vibration by Lorentz force and the motion of the tube is detected by a laser Doppler vibrometer (LDV), a Polytec MSA-600 microsystem analyzer. The tube has a resistance of 0.1 Ω. The mass flow sensor has been tested with water over a mass flow range of 0-20 g/h and shows a linear response that corresponds well with theory. The sensor results in a pressure drop of approximately 1 bar at the maximum flow rate of 20 g/h.
ISSN:2168-9229
DOI:10.1109/SENSORS52175.2022.9967259