A MEMS Microvalve Array For Gas Flow Control

This paper reports the design, and characterization of a microvalve array (MV) chip comprising five membranes, microfluidic channels, and inlet/outlet ports. The MV chip is developed to be integrated into the Spacecraft Atmosphere Monitor (SAM), a miniaturized instrument that monitors the internatio...

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Bibliographic Details
Main Authors: Coskun, M. Bulut, Jung-Kubiak, Cecile, Rahiminejad, Sofia, Toda, Risaku, Shevade, Abhijit, Dickie, Matthew, Gill, John, Rais-Zadeh, Mina
Format: Conference Proceeding
Language:English
Subjects:
Conferences
Electrostatic actuation
gas valve
Instruments
International Space Station
MEMS
Micromechanical devices
microvalve
Microvalves
Safety
Space vehicles
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Summary:This paper reports the design, and characterization of a microvalve array (MV) chip comprising five membranes, microfluidic channels, and inlet/outlet ports. The MV chip is developed to be integrated into the Spacecraft Atmosphere Monitor (SAM), a miniaturized instrument that monitors the international space station (ISS) cabin atmosphere to ensure that the air quality is within the safety margins for the crew. Here, we demonstrate that the MV chip offers stiction-free operation, provides excellent electrical isolation among the valves, has negligible leak rate, and more importantly the device can successfully operate in the experimental scenarios simulating flight-like operation configurations.
ISSN:2160-1968
DOI:10.1109/MEMS51670.2022.9699667