Sputtering Growth of Low-Damping Yttrium-Iron-Garnet Thin Films

Sputtering Growth of Low-Damping Yttrium-Iron-Garnet Thin Films

This letter reports the development of low-damping yttrium-iron-garnet (YIG) thin films via sputtering. The films were deposited by sputtering at room temperature first and were then annealed in O 2 at high temperature. It is found that the annealing temperature critically affects the structural pro...

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Bibliographic Details
Published in:IEEE magnetics letters 2020, Vol.11, p.1-5
Main Authors: Ding, Jinjun, Liu, Tao, Chang, Houchen, Wu, Mingzhong
Format: Article
Language:eng
Subjects:
Anisotropic magnetoresistance
Annealing
annealing temperature
Coercivity
Damping
Ferromagnetic materials
Ferromagnetic resonance
Gilbert damping
Gyromagnetic ratio
High temperature
Iron
Magnetic films
magnetic thin films
Magnons
Microwave magnetics
Resonance scattering
Room temperature
Sputtering
Surface roughness
Thick films
Thickness
Thin films
Yttrium
Yttrium compounds
Yttrium-iron garnet
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Summary:This letter reports the development of low-damping yttrium-iron-garnet (YIG) thin films via sputtering. The films were deposited by sputtering at room temperature first and were then annealed in O 2 at high temperature. It is found that the annealing temperature critically affects the structural properties of the YIG films and thereby dictates the static and dynamic properties of the films. A 75 nm thick YIG film annealed at 900 °C shows an rms surface roughness of 0.08 nm, a coercivity of only 14 A/m (or 0.18 Oe), a saturation induction of 0.1778 T (or 1778 G), which is very close to the bulk value, a gyromagnetic ratio of 2.82 x 10 4 MHz/T (or 2.82 MHz/Oe), which almost matches the standard value, and a Gilbert damping constant of α≈5.2 x 10 -5 , which is the lowest among the values reported so far for magnetic films in the nanometer thickness range. Frequency-dependent ferromagnetic resonance measurements with different field orientations confirmed that two-magnon scattering, if present, is very weak, and the measured damping value represents the actual damping of the YIG film.
ISSN:1949-307X
1949-3088