3-D Ultrasonic Fingerprint Sensor-on-a-Chip

A fully integrated 3-D ultrasonic fingerprint sensor-on-a-chip is presented. The device consists of a 110× 56 piezoelectric micromachined ultrasonic transducer (PMUT) array bonded at the wafer level to custom readout electronics fabricated in a 180-nm CMOS process with a HV (24 V) transistor option....

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Bibliographic Details
Published in:IEEE journal of solid-state circuits 2016-11, Vol.51 (11), p.2522-2533
Main Authors: Hao-Yen Tang, Yipeng Lu, Xiaoyue Jiang, Ng, Eldwin J., Tsai, Julius M., Horsley, David A., Boser, Bernhard E.
Format: Article
Language:English
Subjects:
Acoustics
Arrays
Devices
Electronics
Epidermis
Fingerprint recognition
Fingerprint sensor
Fingerprints
high voltage
Imaging
Impedance
Perspiration
piezoelectric micromachined ultrasonic transducer (PMUT)
sensor-on-a-chip
Sensors
Transducers
ultrasonic
Ultrasonic transducers
wafer bonding
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Summary:A fully integrated 3-D ultrasonic fingerprint sensor-on-a-chip is presented. The device consists of a 110× 56 piezoelectric micromachined ultrasonic transducer (PMUT) array bonded at the wafer level to custom readout electronics fabricated in a 180-nm CMOS process with a HV (24 V) transistor option. With the 24 V driving signal strength, the sensor consumes 280 μJ to image a 4.73 mm × 3.24 mm section of a fingerprint at a rate of 380 fps. A wakeup mode that detects the presence of a finger at 4 fps and dissipates 10 μW allows the proposed sensor to double as a power switch. The sensor is capable of imaging both the surface epidermal and subsurface dermal fingerprints and is insensitive to contaminations, including perspiration or oil. The 3-D imaging capability combined with the sensor's sensitivity to the acoustic properties of the tissue translates into excellent robustness against spoofing attacks.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2016.2604291