Capacitance Based Tunable Micromechanical Resonators

We present actuators which tune the resonant frequency of micromechanical oscillators. Experimental results show resonant oscillations from 7.7% to 146% of the original resonant frequency. Numerical results substantiate these results. Two failure modes have been identified which limit

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Bibliographic Details
Main Authors: Adams, S.G., Bertsch, F.M., Shaw, K.A., Hartwell, P.G., MacDonald, N.C., Moon, F.C.
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Electrodes
Electrostatic actuators
Equations
Laser tuning
Mechanical systems
Micromechanical devices
Oscillators
Resonance
Resonant frequency
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Description
Summary:We present actuators which tune the resonant frequency of micromechanical oscillators. Experimental results show resonant oscillations from 7.7% to 146% of the original resonant frequency. Numerical results substantiate these results. Two failure modes have been identified which limit
DOI:10.1109/SENSOR.1995.717233