A high-speed atomic and friction force microscopic imaging system based on a novel optical beam deflection design

High-speed atomic force microscope has been a promising tool for dynamic process investigation in the fields such as crystallization, phase change, biological and biophysical events, nanolithography as well as industrial serial production. In the paper, the principle of atomic and friction force mic...

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Bibliographic Details
Main Authors: Haiyun Fan, Wei Cai, Jianyong Zhao, Guangyi Shang
Format: Conference Proceeding
Language:English
Subjects:
atomic force microscope
Atomic force microscopy
Force
Friction
friction force
high-speed
Laser beams
Optical beams
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Summary:High-speed atomic force microscope has been a promising tool for dynamic process investigation in the fields such as crystallization, phase change, biological and biophysical events, nanolithography as well as industrial serial production. In the paper, the principle of atomic and friction force microscopic imaging is first described. A high-speed atomic and friction force microscopic imaging system based on a novel optical beam deflection design is then presented in details. Topographic and friction force images of a fluorine-doped tin oxide-coated conductive glass surface taken with the system are given, showing that the system has the high speed imaging capability with a nanometer resolution.
ISSN:1558-2809
2832-4242
DOI:10.1109/IST.2013.6729737