High Purity LP-MOVPE Process of Ill/V Compounds Using an Inert Carrier Gas with Drastically Reduced Hazards

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Bibliographic Details
Main Authors: Hergeth, J., Lengeling, G., Schmitz, D., Jurgensen, H.
Format: Conference Proceeding
Language:English
Subjects:
Atmosphere
Epitaxial growth
Epitaxial layers
Explosives
Gallium arsenide
Gases
Indium phosphide
Lattices
Nitrogen
Substrates
Online Access:Request full text
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DOI:10.1109/MOVPE.1992.664984