The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe....

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Main Authors: Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., Musch, T.
Format: Conference Proceeding
Language:English
Subjects:
3D-electromagnetic field simulation
active plasma resonance spectroscopy
Assembly
Frequency measurement
Materials requirements planning
multipole resonance probe
plasma diagnostics
Plasma measurements
Plasmas
Probes
Resonant frequency
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cited_by cdi_FETCH-LOGICAL-c139t-8d1c4d1d6a2b2572c21ffb2789ef8834f90441a3e8d7478f1855ff480077bc9d3
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container_start_page 566
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creator Schulz, C.
Rolfes, I.
Styrnoll, T.
Awakowicz, P.
Lapke, M.
Oberrath, J.
Mussenbrock, T.
Brinkmann, R. P.
Storch, R.
Musch, T.
description A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe.
doi_str_mv 10.23919/EuMC.2012.6459256
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects 3D-electromagnetic field simulation
active plasma resonance spectroscopy
Assembly
Frequency measurement
Materials requirements planning
multipole resonance probe
plasma diagnostics
Plasma measurements
Plasmas
Probes
Resonant frequency
title The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
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