The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe....

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Bibliographic Details
Main Authors: Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., Musch, T.
Format: Conference Proceeding
Language:English
Subjects:
3D-electromagnetic field simulation
active plasma resonance spectroscopy
Assembly
Frequency measurement
Materials requirements planning
multipole resonance probe
plasma diagnostics
Plasma measurements
Plasmas
Probes
Resonant frequency
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Summary:A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe.
DOI:10.23919/EuMC.2012.6459256