A MEMS Doubly Decoupled Gyroscope With Wide Driving Frequency Range

This study developed a microelectromechanical systems (MEMS) doubly decoupled gyroscope with a wide driving frequency range. The gyroscope increases the resonance bandwidths of both the drive and sense oscillators without sacrificing their Q factors. This bandwidth enhancement ensures good frequency...

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Bibliographic Details
Published in:IEEE transactions on industrial electronics (1982) 2012-12, Vol.59 (12), p.4921-4929
Main Authors: Tsai, Chun-Wei, Chen, Kai-hsin, Shen, Ching-Kai, Tsai, Jui-che
Format: Article
Language:English
Subjects:
Angular rate sensor
Bandwidth
Couplings
Devices
doubly decoupled structure
Driving
Frequency ranges
Gyroscopes
MEMS gyroscope
Microelectromechanical systems
Micromechanical devices
Oscillators
Resonant frequency
Springs
Tuning
wide driving frequency range
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Summary:This study developed a microelectromechanical systems (MEMS) doubly decoupled gyroscope with a wide driving frequency range. The gyroscope increases the resonance bandwidths of both the drive and sense oscillators without sacrificing their Q factors. This bandwidth enhancement ensures good frequency matching between the drive and sense oscillators even if fabrication imperfections are present. Additionally, no in-operation frequency tuning mechanism is needed. The gyroscope can be driven at any frequency within the overlapping region of the resonance bands of the drive and sense oscillators. Experiments showed that the gyroscope driving voltage can be of any frequency within a ~240-Hz bandwidth. The wide bandwidth provides flexibility and ease of use. The device is fabricated by the MetalMUMPs process developed by MEMSCAP, Inc. Its doubly decoupled structure minimizes the interference/coupling between the drive and sense units. Performance tests under rotation rates equal to or smaller than 18.71 rad/s showed that the gyroscope has a sensitivity of 4.28 mV/(rad/s).
ISSN:0278-0046
1557-9948
DOI:10.1109/TIE.2011.2177612