Monolithically Integrated Two-Axis Microtensile Tester for the Mechanical Characterization of Microscopic Samples

This paper describes the first monolithically integrated two-axis microtensile tester and its application to the automated stiffness measurement of single epidermal plant cells. The tensile tester consists of a two-axis electrostatic actuator with integrated capacitive position sensors and a two-axi...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2010-10, Vol.19 (5), p.1223-1233
Main Authors: Muntwyler, S, Kratochvil, B E, Beyeler, F, Nelson, B J
Format: Article
Language:English
Subjects:
Actuators
Applied sciences
Automated
Calibration
capacitive microforce and position sensing
Computer simulation
electrostatic actuation
Elongation
Exact sciences and technology
Force
Force sensors
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical models
Measurement uncertainty
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Monte Carlo simulation
Physics
Precision engineering, watch making
Sensors
Stiffness
Transducers
Uncertainty
uncertainty analysis
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Summary:This paper describes the first monolithically integrated two-axis microtensile tester and its application to the automated stiffness measurement of single epidermal plant cells. The tensile tester consists of a two-axis electrostatic actuator with integrated capacitive position sensors and a two-axis capacitive microforce sensor. It is fabricated using a bulk silicon microfabrication process. The actuation range is +/-16 m along both axes with a position resolution of 20 nm. The force sensor is capable of measuring forces up to +/-60 N with a resolution down to 60 nN. The position-feedback sensors as well as the force sensor are calibrated by direct comparison with reference standards. A complete uncertainty analysis through the entire calibration chain based on the Monte Carlo method is presented. The functionality of the tensile tester is demonstrated by the automated stiffness measurement of the elongated cells in plant hairs (trichomes) as a function of their size. This enables a quantitative understanding and a model-based simulation of plant growth based on actual measurement data.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2010.2067443