LiNbO3 Film Bulk Acoustic Resonator

As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO 3 ) appears as a candidate for the next generation of ultra wide band Radio Frequency (RF) filters. Depending on the crystalline orientation, LiNbO 3 can achieve electromechanical coupling factors Kt 2...

Full description

Saved in:
Bibliographic Details
Main Authors: Pijolat, M, Loubriat, S, Mercier, D, Reinhardt, A, Defaÿ, E, Deguet, C, Aïd, M, Queste, S, Ballandras, S
Format: Conference Proceeding
Language:English
Subjects:
Couplings
Crystals
Film bulk acoustic resonators
Q factor
Resonator filters
Citations: Items that cite this one
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO 3 ) appears as a candidate for the next generation of ultra wide band Radio Frequency (RF) filters. Depending on the crystalline orientation, LiNbO 3 can achieve electromechanical coupling factors Kt 2 more than 6 times larger than those of sputtered aluminium nitride films. In this paper, a process based on direct bonding, grinding, polishing and Deep Reactive Ion Etching (DRIE) is proposed to fabricate a single crystal LiNbO 3 Film Bulk Acoustic Resonator (FBAR). From the fabricated test vehicles Kt 2 of 45% is measured confirming the values predicted by theoretical computations.
ISSN:2327-1914
DOI:10.1109/FREQ.2010.5556245