Vertically Oriented Titania Nanotubes Prepared by Anodic Oxidation on Si Substrates

Vertically oriented titania nanotube arrays were fabricated by anodization of titanium film deposited on silicon substrates under different processing conditions. The anodic formation of nanoporous titania on silicon substrate was investigated in aqueous solutions mixed with highly corrosive Na 2 SO...

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Bibliographic Details
Published in:IEEE transactions on nanotechnology 2008-03, Vol.7 (2), p.131-134
Main Authors: Yang, Dae-Jin, Kim, Ho-Gi, Cho, Seong-Je, Choi, Won-Youl
Format: Article
Language:English
Subjects:
Anodization
Anodizing
aqueous electrolyte
Arrays
Current density
Deposition
Nanoporous materials
Nanostructure
nanotube arrays
Nanotubes
Oxidation
Semiconductor films
Silicon
Silicon substrates
Substrates
Temperature
thin film
titania
Titanium
Titanium dioxide
Voltage
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Summary:Vertically oriented titania nanotube arrays were fabricated by anodization of titanium film deposited on silicon substrates under different processing conditions. The anodic formation of nanoporous titania on silicon substrate was investigated in aqueous solutions mixed with highly corrosive Na 2 SO 4 /NaF/citric acid. In the result of the anodization of titanium film deposited at room temperature, a very thin layer of ~70 nm having a worm-like structure was grown on the top of the porous layer. But, in the case of titanium film deposited at 500deg, vertically oriented TiO 2 nanotube arrays were formed. The average tube outer diameter of the nanotube was 74 nm to 100 nm. The longest nanotube of 681 mum was obtained at 15 V and 30 min. The current density transient curve recorded during anodization under a constant voltage showed a typical behavior for self-organized pore formation.
ISSN:1536-125X
1941-0085
DOI:10.1109/TNANO.2007.909439