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A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir

This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2×3 cm 2 chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5×1.5×1 cm 3 ....

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Bibliographic Details
Main Authors: Evans, A.T., Park, J.M., Nellis, G.F., Klein, S.A., Feller, J.R., Salerno, L., Gianchandani, Y.B.
Format: Conference Proceeding
Language:English
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Summary:This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2×3 cm 2 chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5×1.5×1 cm 3 . Using the finished device, regulated diffusion of a fluorescent dye into agar gel was demonstrated. Fluid flow out of the 500 μL reservoir could be regulated from 10-500 μL/min with up to 80 kPa of delivery pressure. Typical regulation consumes 0.136 μW of power. Analysis of the valve, reservoir springs, and a model based on pressure-enhanced diffusion are presented and are validated by experimental data.
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300142