Roll-to-roll manufacturing technologies for flexible MEMS applications

Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced

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Bibliographic Details
Main Authors: Kololuoma, T., Tuomikoski, M., Haring, T., Kopola, H.
Format: Conference Proceeding
Language:English
Subjects:
Flexible manufacturing systems
Ink
Micromechanical devices
Optical device fabrication
Optical devices
Optical films
Optical sensors
Packaging
Printing
Production facilities
Online Access:Request full text
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Description
Summary:Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced
ISSN:2160-5033
DOI:10.1109/OMEMS.2005.1540090