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Poly (vinyl-alcohol) films for microphotonics
This paper presents experimental results concerning the influence of additives from a solution of the PVA on the optical properties of the polymer. The refractive index of the poly (vinyl-alcohol) was modified through the addition of inorganic materials and showed values between 1.5 and 2 depending...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | This paper presents experimental results concerning the influence of additives from a solution of the PVA on the optical properties of the polymer. The refractive index of the poly (vinyl-alcohol) was modified through the addition of inorganic materials and showed values between 1.5 and 2 depending on the compositions and the curing conditions of the polymer. The transmittance indicated values above 80%. The additives we used were metal oxides/inorganic salts. The composition and the deposition processes were optimized to allow a better control of the optical parameters (refractive index, transmittance), to reduce the processing temperatures and to improve photosensitivity. PVA with these new light-sensitive compositions can be easily spin coated onto variety of semiconductor substrate and directly patterned. A process was developed for channel waveguides fabrication. |
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DOI: | 10.1109/ICM.2004.1434756 |