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Polymer thin film refractive index determination

This work presents two methods to evaluate the refractive index of a SU8 polymer thin film, used as an optical waveguide for an interferometric integrated sensor. We used Abbe's method and the fitting method, by fitting theoretical curves to the experimental curves. We also compared the results...

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Bibliographic Details
Main Authors: Damian, V., Logofatu, P.C., Apostol, D., Garoi, F., Iordache, I., Timcu, A., Ligor, O., Muller, R.
Format: Conference Proceeding
Language:English
Subjects:
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Summary:This work presents two methods to evaluate the refractive index of a SU8 polymer thin film, used as an optical waveguide for an interferometric integrated sensor. We used Abbe's method and the fitting method, by fitting theoretical curves to the experimental curves. We also compared the results given by the two methods.
DOI:10.1109/SMICND.2004.1403042