Adsorbed mass and resonant frequency fluctuations of a microcantilever caused by adsorption and desorption of particles of two gases

Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical...

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Bibliographic Details
Main Authors: Djuric, Z., Jokic, L., Frantlovic, M., Jaksic, O., Vasiljevic-Radovic, D.
Format: Conference Proceeding
Language:English
Subjects:
Atmosphere
Atmospheric modeling
Electrons
Exact sciences and technology
Fluctuations
Gases
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Nitrogen
Performance analysis
Physics
Resonant frequency
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Silicon
Solids
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Summary:Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical approach. The analogy between Shockley-Read generation-recombination processes of electrons in solids and adsorption-desorption processes of particles of a two gas atmosphere around the cantilever is shown. Simulation is given for a silicon microcantilever surrounded by nitrogen and hydrogen.
DOI:10.1109/ICMEL.2004.1314592