MISiCFET sensor arrays for on line diagnosis

Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate...

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Bibliographic Details
Main Authors: Spetz, A.L., Wingbrant, H., Andersson, M., Lofdahl, M., Einehag, M., Ljung, P., Svenningstorp, H., Visser, J.H., Kubinski, D., Mattsson, M., Salomonsson, P., Savage, S.
Format: Conference Proceeding
Language:English
Subjects:
Boilers
Chemical sensors
Combustion
Flue gases
Gas detectors
Insulation
Metal-insulator structures
Sensor arrays
Silicon carbide
Temperature sensors
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Summary:Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.
DOI:10.1109/ICSENS.2003.1279119