Asymmetric focused-ion-beam trimming of longitudinal and perpendicular write heads

A novel focused-ion-beam (FIB) head trimming technique is described. As compared to the conventional approach of a symmetric trim, an asymmetric process, whereby only one side of a write pole is FIB milled to achieve the target width, is demonstrated to be robust and advantageous. We use this techni...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2003-09, Vol.39 (5), p.2408-2410
Main Authors: Clinton, T.W., Zhang, Z.Z., Feng, Y.C., van der Heijden, P.A.A.
Format: Article
Language:English
Subjects:
Applied sciences
Degradation
Electrical resistance measurement
Electronics
Exact sciences and technology
Instruments
Ion beams
Magnetic devices
Magnetic heads
Magnetic recording
Magnetic thin film devices: magnetic heads (magnetoresistive, inductive, etc.)
domain-motion devices, etc
Magnetism
Milling machines
Perpendicular magnetic recording
Robustness
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
System analysis and design
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Summary:A novel focused-ion-beam (FIB) head trimming technique is described. As compared to the conventional approach of a symmetric trim, an asymmetric process, whereby only one side of a write pole is FIB milled to achieve the target width, is demonstrated to be robust and advantageous. We use this technique for both longitudinal and perpendicular HGA-level head trimming, demonstrating excellent recording performance out to areal densities of more than 100 Gb/in/sup 2/.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2003.815465