Large format backside illuminated CCD imager for space surveillance

The key features and performance data of a 2560/spl times/1960-pixel split-frame-transfer imager developed for space surveillance is described. The eight-port, backside illuminated charge coupled device (CCD) features 24 /spl mu/m pixels with buried blooming drains to provide 100% optical fill-facto...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2003-01, Vol.50 (1), p.218-224
Main Authors: Tower, J.R., Swain, P.K., Fu-Lung Hsueh, Dawson, R.M., Levine, P.A., Meray, G.M., Andrews, J.T., Frantz, V.L., Grygon, M.S., Reale, M.A., Sudol, T.M.
Format: Article
Language:English
Subjects:
Blooms (metal)
Charge coupled devices
Charge coupled image sensors
Clocks
Focal plane
Imaging
Integrated circuit noise
Pixels
Registers
Space surveillance
Surveillance
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Summary:The key features and performance data of a 2560/spl times/1960-pixel split-frame-transfer imager developed for space surveillance is described. The eight-port, backside illuminated charge coupled device (CCD) features 24 /spl mu/m pixels with buried blooming drains to provide 100% optical fill-factor and >1000/spl times/ overload protection from blooming. The imaging and storage registers are strapped with metal to achieve vertical transfer clock rates >400 KHz for the 61 mm long imaging register gates. The 5 million pixel array operates at 2.7 frames/s. The monolithic focal plane includes a 32/spl times/32-pixel frame-transfer imager, with a single output, which operates at 1000 frames/s. The output ports employ a floating diffusion output circuit with responsivity of 10.5 /spl mu/V/e and noise of 7e RMS at a 1.25 MHz clock rate. The imager is photocomposed employing a combination of 5/spl times/ and 1/spl times/ lithography. The photocomposition approach is described.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2002.807715