Experimental research of silicon flowmeters based on piezoresistance effect

The experimental results are presented for silicon flowmeter in a range of gas range 20 - 1000 1/h.

Bibliographic Details

Main Authors:	Kolchuzhin, V.A., Nazin, A.V., Shaporin, A.V.
Format:	Conference Proceeding
Language:	English
Subjects:	Bridge circuits Heating Piezoresistance Piezoresistive devices Pollution measurement Resistors Semiconductor device measurement Silicon Temperature dependence Temperature distribution
Online Access:	Request full text
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