Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration

This paper deals with the development of a fully electrical method to estimate the sensitivity of capacitive MEMS accelerometers in batch fabrication. The objectives are to test and calibrate them without the need of costly and time-consuming mechanical test equipments. Alternate electrical test mea...

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Bibliographic Details
Published in:Journal of electronic testing 2010-02, Vol.26 (1), p.111-125
Main Authors: Dumas, Norbert, Azaïs, Florence, Mailly, Frédérick, Nouet, Pascal
Format: Article
Language:English
Subjects:
CAE) and Design
Calibration
Circuits and Systems
Computer-Aided Engineering (CAD
Electrical Engineering
Electronics
Engineering
Engineering Sciences
Measurement techniques
Micro and nanotechnologies
Microelectronics
Monte Carlo simulation
Product testing
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Summary:This paper deals with the development of a fully electrical method to estimate the sensitivity of capacitive MEMS accelerometers in batch fabrication. The objectives are to test and calibrate them without the need of costly and time-consuming mechanical test equipments. Alternate electrical test measurements are introduced and two methods are evaluated. The first one is based on the analytical study of the relations between the electrical test parameters and the sensitivity. The second one is based on a regression analysis of these relations on a learning batch of sensors. Both are evaluated on a case study accelerometer with Monte Carlo simulations. Applying the methods for calibration shows that the dispersion of the sensitivity can be improved. Results show that the second method is more promising.
ISSN:0923-8174
1573-0727
DOI:10.1007/s10836-009-5122-6