Hetero-epitaxy of SrTiO3 on si and control of the interface

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Bibliographic Details
Published in:Thin solid films 2007-06, Vol.515 (16), p.6332-6336
Main Authors: DELHAYE, G, EL KAZZI, M, GENDRY, M, HOLLINGER, G, ROBACH, Y
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Engineering Sciences
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Micro and nanotechnologies
Microelectronics
Molecular, atomic, ion, and chemical beam epitaxy
Physics
Theory and models of film growth
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ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2006.11.187