Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes

A new SCR-based device for ESD protection is presented through TCAD simulation and experimental results on a standalone configuration and for a power supply ESD clamp strategy. The new device can turn-off even if the voltage power supply is applied at its Anode. We use 3D TCAD simulation for underst...

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Bibliographic Details
Published in:Microelectronics and reliability 2018-06, Vol.85, p.176-189
Main Authors: Loayza, Jorge, Guitard, Nicolas, Allard, Bruno, Phung, Luong Viêt, Jacquier, Blaise, Galy, Philippe
Format: Article
Language:English
Subjects:
Electric power
Electrical overstress
Engineering Sciences
EOS
EOS characterization
ESD
Power supply clamp
Silicon-controlled rectifier
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Summary:A new SCR-based device for ESD protection is presented through TCAD simulation and experimental results on a standalone configuration and for a power supply ESD clamp strategy. The new device can turn-off even if the voltage power supply is applied at its Anode. We use 3D TCAD simulation for understanding its turn-on and turn-off behavior. At the same time, the flexibility of the EOS test bench allows for standalone and power supply clamp characterizations at chip level at ambient and high temperature. •A new SCR-based device with a turn-off capability presented•SCR-based device triggering and turn-off results thanks to 3D TCAD simulation•Trigger circuit design and SPICE simulation for control of the device•Fabricated standalone and fully embedded ESD power supply clamps characterized•SCR mistriggering due to EOS-like aggressors potentially solved
ISSN:0026-2714
1872-941X
DOI:10.1016/j.microrel.2018.04.013