CuO/ZnO Nanocomposite Gas Sensors Developed by a Plasma-Assisted Route

CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma‐assisted approach, combining the initial growth of ZnO columnar arrays by plasma‐enhanced chemical vapor deposition (PE‐CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Ch...

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Bibliographic Details
Published in:Chemphyschem 2012-06, Vol.13 (9), p.2342-2348
Main Authors: Simon, Quentin, Barreca, Davide, Gasparotto, Alberto, Maccato, Chiara, Tondello, Eugenio, Sada, Cinzia, Comini, Elisabetta, Sberveglieri, Giorgio, Banerjee, Manish, Xu, Ke, Devi, Anjana, Fischer, Roland A.
Format: Article
Language:English
Subjects:
Chemical Sciences
chemical vapor deposition
copper sputtering
CuO
Exact sciences and technology
gas sensors
General equipment and techniques
Inorganic chemistry
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Material chemistry
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
ZnO
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Summary:CuO/ZnO nanocomposites were synthesized on Al2O3 substrates by a hybrid plasma‐assisted approach, combining the initial growth of ZnO columnar arrays by plasma‐enhanced chemical vapor deposition (PE‐CVD) and subsequent radio frequency (RF) sputtering of copper, followed by final annealing in air. Chemical, morphological, and structural analyses revealed the formation of high‐purity nanosystems, characterized by a controllable dispersion of CuO particles into ZnO matrices. The high surface‐to‐volume ratio of the obtained materials, along with intimate CuO/ZnO intermixing, resulted in the efficient detection of various oxidizing and reducing gases (such as O3, CH3CH2OH, and H2). The obtained data are critically discussed and interrelated with the chemical and physical properties of the nanocomposites. Trapped in the array: High‐purity p‐type CuO/n‐type ZnO nanocomposites were prepared by Cu sputtering on columnar ZnO arrays obtained by plasma‐enhanced chemical vapor deposition, followed by annealing in air. Preliminary gas‐sensing tests revealed very attractive responses, along with the possibility of discriminating between oxidizing and reducing species.
ISSN:1439-4235
1439-7641
DOI:10.1002/cphc.201101062