Degradation in polysilicon thin film transistors related to the quality of the polysilicon material

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Bibliographic Details
Published in:Microelectronics and reliability 2003-09, Vol.43 (9-11), p.1531-1535
Main Authors: Toutah, H., Tala-Ighil, B., Llibre, Jean-François, Boudart, B., Mohammed-Brahim, T., Bonnaud, O.
Format: Article
Language:English
Subjects:
Electronics
Engineering Sciences
Online Access:Get full text
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ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(03)00271-3