Experimental investigation of electron transport across a magnetic field barrier in electropositive and electronegative plasmas

In this paper we experimentally investigate the E×B drift of electrons in low temperature plasmas containing a magnetic field barrier; a plasma configuration commonly used in gridded negative ion sources. A planar Langmuir probe array is developed to quantify the E×B drift of electrons over the cros...

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Bibliographic Details
Published in:Plasma sources science & technology 2016-08, Vol.25 (4), p.45018
Main Authors: Thomas, M B, Rafalskyi, D, Lafleur, T, Aanesland, A
Format: Article
Language:English
Subjects:
electron transport
electronegative plasmas
experiments
ion-ion plasmas
Physics
Plasma Physics
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Summary:In this paper we experimentally investigate the E×B drift of electrons in low temperature plasmas containing a magnetic field barrier; a plasma configuration commonly used in gridded negative ion sources. A planar Langmuir probe array is developed to quantify the E×B drift of electrons over the cross-section of the ion-extraction region of an ion-ion plasma source. The drift is studied as a function of pressure using both electropositive plasmas (Ar), as well electronegative plasmas (Ar and SF6 mixtures), and is demonstrated to result from an interaction of the applied magnetic field and the electric fields in the sheath and pre-sheath near the transverse boundaries. The drift enhances electron transport across the magnetic field by more than two orders of magnitude compared with simple collisional transport, and is found to be strongly dependant on pressure. The lowest pressure resulted in the highest influence of the drift across the extraction area and is found to be 30%.
ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/25/4/045018