Fabrication of silicon-on-diamond substrate with an ultrathin SiO 2 bonding layer

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2018-06, Vol.57 (6S1), p.6
Main Authors: Nagata, Masahiro, Shirahama, Ryouya, Duangchan, Sethavut, Baba, Akiyoshi
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.57.06HJ08