Effect of temperature on deposition layer formation in HBr/N 2 /fluorocarbon-based plasma

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2017-06, Vol.56 (6S2), p.6
Main Authors: Iwase, Taku, Yokogawa, Kenetsu, Mori, Masahito
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.56.06HB04