Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-01, Vol.50 (1S1), p.1
Main Authors: Lee, Kong-Soo, Yeo, Chadong, Yoo, Dae-Han, Kim, Seok-Sik, Moon, Joo-Tae, Jung, Soon-Moon, Son, Yong-Hoon, Park, Hyunho, Jeong, Hanwook, Kim, Kwang-Ryul, Choi, Byoungdeog
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.01AB06