Demonstration of dielectric measurement using a probe-backside reflection method up to 300 GHz

This study demonstrates a novel low-loss dielectric measurement technique that utilizes reflections at the backside of a probe in the millimeter-wave frequency range up to 300 GHz. The accuracy of measurement was investigated by evaluating the measurement uncertainty contributors individually. Furth...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2019-11, Vol.58 (SL), p.SLLE02
Main Authors: Sakamaki, Ryo, Horibe, Masahiro, Yoshida, Manabu, Tsurumi, Takaaki
Format: Article
Language:English
Subjects:
Accuracy
Aluminum oxide
Circuits
Dielectric loss
Dielectric properties
Evaluation
Fourier transforms
Frequency ranges
Infrared spectroscopy
Measurement techniques
Millimeter waves
Model accuracy
Phonons
Substrates
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Summary:This study demonstrates a novel low-loss dielectric measurement technique that utilizes reflections at the backside of a probe in the millimeter-wave frequency range up to 300 GHz. The accuracy of measurement was investigated by evaluating the measurement uncertainty contributors individually. Further, the dielectric dispersion of alumina was calculated from a phonon model. The evaluated dielectric constant and dielectric loss tangent corresponded with values in the accuracy range generated by the phonon model, which was constructed from Fourier transform infrared spectroscopy (FT-IR). These results validated the accuracy of the proposed method in the millimeter-wave frequencies. The measurement technique is expected to be useful for the evaluation of dielectric properties of circuit substrates used in "Beyond 5G" communication technologies.
ISSN:0021-4922
1347-4065
DOI:10.7567/1347-4065/ab36f6