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Picosecond laser system with a wavelength of 193nm based on a solid-state Nd:YAG laser, parametric oscillator, and ArF amplifier

Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ.

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Bibliographic Details
Published in:Physics of wave phenomena 2014-10, Vol.22 (4), p.223-226
Main Authors: Sadovskii, S. P., Chizhov, P. A., Bukin, V. V., Brendel, V. M., Dolmatov, T. V., Polivanov, Yu. N., Orlov, S. N., Garnov, S. V., Vartapetov, S. K.
Format: Article
Language:English
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Description
Summary:Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ.
ISSN:1541-308X
1934-807X
DOI:10.3103/S1541308X14040025