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Picosecond laser system with a wavelength of 193nm based on a solid-state Nd:YAG laser, parametric oscillator, and ArF amplifier
Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ.
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Published in: | Physics of wave phenomena 2014-10, Vol.22 (4), p.223-226 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ. |
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ISSN: | 1541-308X 1934-807X |
DOI: | 10.3103/S1541308X14040025 |