High efficiency regulation method to generate illumination source by adopting micromirror array in DUV lithography

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Bibliographic Details
Published in:Applied optics (2004) 2024-09
Main Authors: Li, Yanqiu, Chen, Yuqing, liu, lihui
Format: Article
Language:English
Online Access:Get full text
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ISSN:1559-128X
2155-3165
DOI:10.1364/AO.536947