Preparation and Characterization of a Microfabricated Oxide-on-Oxide Catalyst of α-Sb2O4/VSbO4

We have prepared microfabricated α-Sb2O4 thin films on VSbO4 by electron lithography. The VSbO4 thin films were prepared on a Si substrate by a sol–gel method combined with a spin coating. The size, separation and arrangement of the α-Sb2O4 overlayer were controlled by electron-beam lithography. We...

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Bibliographic Details
Published in:Bulletin of the Chemical Society of Japan 2005-03, Vol.78 (3), p.435-442
Main Authors: Ohminami, Yusuke, Suzuki, Shushi, Matsudaira, Nobuaki, Nomura, Tomoko, Chun, Wang-Jae, Ijima, Kaoru, Nakamura, Motonori, Mukasa, Koichi, Nagase, Masao, Asakura, Kiyotaka
Format: Article
Language:English
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Summary:We have prepared microfabricated α-Sb2O4 thin films on VSbO4 by electron lithography. The VSbO4 thin films were prepared on a Si substrate by a sol–gel method combined with a spin coating. The size, separation and arrangement of the α-Sb2O4 overlayer were controlled by electron-beam lithography. We could successfully draw 0.5 μm wide lines with a separation of 2 μm. A preliminary study on the catalysis showed an enhancement of the selectivity in a propene conversion reaction to acrolein on a microfabricated α-Sb2O4/VSbO4.
ISSN:0009-2673
1348-0634
DOI:10.1246/bcsj.78.435