Adjusting the Skeleton and Pore Structure of Porous SiCOH Dielectrics

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2009, Vol.156 (10), p.G156
Main Authors: Gates, S. M., Dubois, G., Ryan, E. T., Grill, A., Liu, M., Gidley, D.
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.3186029