Investigation and Analysis of AlGaN MOS Devices with an Oxidized Layer Grown Using the Photoelectrochemical Oxidation Method

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2007, Vol.154 (10), p.H862
Main Authors: Huang, Li-Hsien, Lee, Ching-Ting
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.2766643