RIE of a T-shape refractory ohmic contact for self-aligned heterojunction bipolar transistor

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1990-02, Vol.137 (2), p.671-675
Main Authors: COLLUMEAU, J. M, ETRILLARD, J, BRESSE, J. F, DUBON-CHEVALLIER, C
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2086529