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A study of Cu metal deposition on amorphous Si films from Cu solutions for low-temperature crystallization of amorphous Si films

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1997-10, Vol.144 (10), p.3592-3596
Main Authors: Sohn, Dong Kyun, Park, Sung Chan, Kang, Sang Won, Ahn, Byung Tae
Format: Article
Language:English
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1838053