Influence of SC-1/SC-2 cleaning on wafer-bonded silicon dioxide structures

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Bibliographic Details
Published in:Journal of the Electrochemical Society 1996-11, Vol.143 (11), p.3722-3727
Main Authors: ERICSSON, P, BENGTSSON, S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.1837279