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The Sensitivity of Thermal Donor Generation in Silicon to Self-interstitial Sinks

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Published in:	Journal of the Electrochemical Society 2000-10, Vol.147 (10), p.3899
Main Authors:	Voronkov, V. V., Voronkova, G. I., Batunina, A. V., Falster, R., Golovina, V. N., Guliaeva, A. S., Tiurina, N. B., Milvidski, M. G.
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Language:	English
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title	The Sensitivity of Thermal Donor Generation in Silicon to Self-interstitial Sinks
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