The Sensitivity of Thermal Donor Generation in Silicon to Self-interstitial Sinks

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Bibliographic Details
Published in:Journal of the Electrochemical Society 2000-10, Vol.147 (10), p.3899
Main Authors: Voronkov, V. V., Voronkova, G. I., Batunina, A. V., Falster, R., Golovina, V. N., Guliaeva, A. S., Tiurina, N. B., Milvidski, M. G.
Format: Article
Language:English
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ISSN:0013-4651
DOI:10.1149/1.1393993