A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 4B), p.2462-2467
Main Authors: Sato, Norio, Ishii, Hiromu, Shigematsu, Satoshi, Morimura, Hiroki, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Machida, Katsuyuki, Kyuragi, Hakaru
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.2462